Keep your fab running
Your point of reference for robot, pre-aligner, and load port repairs and refurbishment services
foup and fosb cleaner
The world’s only equipment to clean FOUP and FOSB body and cover separately
Overhaul exchange and refurbishment for
Robots, pre-aligners and loadports
We offer pre-aligner, robot and load port repair services. Reliable and enduring solutions for your semi-conductor production machines.
Eumetrys Robotics responds to its customers’ needs quickly and efficiently, thanks to the proven expertise of its staff of engineers. Eumetrys SAS, our semi-conductor production machine repair company, offers various services to its customers depending on their needs. You may choose either a standard replacement or a complete repair of the robots, pre-aligners and load ports on your production line.
We can work on both obsolete and current generation machines in your semi-conductor production plants. We guarantee our customers a solution in the shortest time possible, so that your machines can be reintegrated into your semi-conductor production cycle as quickly as possible.
An expertise on multiple brands
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World’s N°1 FOUP and FOSB cleaner for
< 10nm IC fabs and wafer/substrate manufacturers
At Eumetrys Robotics, we offer the most advanced FOUP and FOSB cleaner on the market. Our cutting-edge technology is the only one globally that cleans both the body and the lid separately, ensuring a superior level of cleanliness and performance. This unique process maximizes efficiency while maintaining the highest standards of precision and contamination control, making it the ideal solution for semiconductor industries.
Experience innovation with Eumetrys Robotics, where we push the boundaries of cleanliness and reliability in every detail.
key features
High productivity (30 FOUPS/hour) •
Humidity control (< 5%) •
Advanced cleaning method •
Advanced in-FOUP wafer detection •
unmatched reliability
Mean time to repair < 4h •
Low alarm frequency (0.31/month) •
Low maintenance •
Mean time time between failures > 1500h •
benefits and features
• N₂ purge and leack check system
• Compact and optimized design
• Superior vacuum dryer
• Full AMHS compatibility